I haven't gotten around to ranking the 1890s yet. Maybe by the end of this year. I did Top 50s for each decade a couple years ago (index here). Here's a new stab at it:
1. A Corner in Wheat (DW Griffith)
2. A Trip to the Moon (George Melies)
3. The Great Train Robbery (Edwin S. Porter)
4. The Pan-American Exposition by Night (Edwin S. Porter)
5. The Dream of a Rarebit Fiend (Edwin S. Porter)
1910s:
1. Intolerance (DW Griffith)
2. The Musketeers of Pig Alley (DW Griffith)
3. The Immigrant (Charles Chaplin)
4. Regeneration (Raoul Walsh)
5. Les Vampires (Louis Feuillade)
1. Sunrise (FW Murnau)
2. The Docks of New York (Josef von Sternberg)
3. The General (Buster Keaton)
4. Sherlock Jr (Buster Keaton)
5. The Man with a Movie Camera (Dziga Vertov)
1. The Rules of the Game (Jean Renoir)
2. Duck Soup (Leo McCarey)
3. Stagecoach (John Ford)
4. City Lights (Charlie Chaplin)
5. Bringing Up Baby (Howard Hawks)
1. Casablanca (Michael Curtiz)
2. The Red Shoes (Michael Powell & Emeric Pressburger)
3. The Shop Around the Corner (Ernst Lubitsch)
4. Children of Paradise (Marcel Carne)
5. Citizen Kane (Orson Welles)
1. Seven Samurai (Akira Kurosawa)
2. Vertigo (Alfred Hitchcock)
3. The Searchers (John Ford)
4. Singin' in the Rain (Stanley Donen & Gene Kelly)
5. Night of the Hunter (Charles Laughton)
1. Pierrot le fou (Jean-Luc Godard)
2. Once Upon a Time in the West (Sergio Leone)
3. Psycho (Alfred Hitchcock)
4. The Umbrellas of Cherbourg (Jacques Demy)
5. Playtime (Jacques Tati)
1970s:
1. Annie Hall (Woody Allen)
2. Days of Heaven (Terrence Malick)
3. Manhattan (Woody Allen)
4. F for Fake (Orson Welles)
5. Two-Lane Blacktop (Monte Hellman)
1. Stranger than Paradise (Jim Jarmusch)
2. Ran (Akira Kurosawa)
3. Hannah and Her Sisters (Woody Allen)
4. Sans soleil (Chris Marker)
5. The Green Ray (Eric Rohmer)
1. Chungking Express (Wong Kar-wai)
2. The Thin Red Line (Terrence Malick)
3. The Big Lebowski (The Coen Brothers)
4. Dead Man (Jim Jarmusch)
5. Rushmore (Wes Anderson)
1. The New World (Terrence Malick)
2. Millennium Mambo (Hou Hsiao-hsien)
3. 2046 (Wong Kar-wai)
4. The Royal Tenenbaums (Wes Anderson)
5. Mulholland Dr. (David Lynch)
1. Certified Copy (Abbas Kiarostami)
2. The Tree of Life (Terrence Malick)
3. Oki's Movie (Hong Sangsoo)
4. Uncle Boonmee Who Can Recall His Past Lives (Apichatpong Weerasethakul)
5. Meek's Cutoff (Kelly Reichardt)